Page 11 - Cleanroom_Genano-Canada_11-2018
P. 11
Nanoscale Particle Purification
RECOVERY TIME METERINGS IN ASTQ
10 000 000
9 000 000
8 000 000
7 000 000 0.5 μm
6 000 000
Particles / m3
5 000 000
4 000 000 ISO 8
3 000 000
2 000 000
1 000 000
0 ISO 7
1 2 3 4 5 6 7 8 9 10 11 12 13 14
Time (min)
ISO-CLASS 6: AT REST, 0,5 μm
(10 SAMPLING LOCATIONS, THE MEAN OF VALUES)
0,5 μm Particles / m3 ISO-Class ISO-Class limit Sampling locations
particles / m3
10 725 6 10
35 200
Class Maximum particles/m³ FED STD 209E
≥ 5 μm EQUIVALENT
≥ 0,1 μm ≥ 0,2 μm ≥ 0,3 μm ≥ 0,5 μm ≥ 1 μm
ISO 1 10 2,37 1,02 0,35 0,083 0,0029
ISO 2 100 23,7 10,2 0,029
ISO 3 1000 237 102 3,52 0,83 0,29
ISO 4 10 000 2370 1020 2,9
ISO 5 100 000 23700 10200 35 8,3 29 Class 1
ISO 6 1,0 x 106 237000 102000 293 Class 10
ISO 7 1,0 x 107 2,37 x 106 1,02 x 106 352 83 2930 Class 100
ISO 8 1,0 x 108 2,37 x 107 1,02 x 107 29300 Class 1,000
ISO 9 1,0 x 109 2,37 x 108 1,02 x 108 3520 832 293000 Class 10,000
Class 100,00
35200 8320 Room air
352000 83200
3520000 832000
35200000 8320000
